Main > ELECTRONICS. > Cleaning > Co.: USA. S. (MegaSonics) > Description

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Patented* single wafer megasonics with DSP power control, including power feedback from the transducer and programmable duty cycle for high power, short duration cycles achieve damage-free cleaning. The unique design, with 40 mm transducer and programmable duty cycle, chemical flow rate, and spindle speed, improves the transport of chemistries or rinse water to the wafer surface and movement of contaminants away from the surface.

Co. s megasonics provide the highest power density of any single wafer system in the industry.




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