Ammonia
Anhydrous HCl
Boron TriFluoride (BF3)
Delivery.
Equipment
Germane (GeH4)
Nitrogen TriFluoride (NF3)
Phosphine (PH3)
Production
Silane (SiH4)
Silicon TetraFluoride (SiF4)
Storage.
TriMethylSilane [HSi(Me)3]
Xenon DiFluoride (XeF2)