| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 11.99 |
| PATENT ASSIGNEE |
Pre-Tech Co Ltd (Tokyo) Ultraclean Technology Research Institute KK (Tokyo) |
| PATENT CLAIMS |
Soln comprising pure water contg - O (20-100 ppb) - N (> 2 ppb) - Impurities (< 10 ppb) |
| PATENT PHOTOCOPY | Available on request |
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