Main > PHOTORESIST

Product Negative. Japan. T. No. 3

PATENT ASSIGNEE'S COUNTRY Japan
UPDATE 07.99
PATENT ASSIGNEE This data is not available for free
PATENT CLAIMS Chemical-sensitization organic solvent soln compn
- Alkali-soluble resin (100 parts) which is a polyhydroxystyre
ne resin with MW > 2000
- Acid-crosslinkable compd (3-70 parts)
- Photoacid generator oximesulfonate (0.5-30 parts) of
formula: R-C(CN)=N-O-SO2-R'; R,R' = Nonaromatic group
PATENT PHOTOCOPY Available on request

Want more information ?
Interested in the hidden information ?
Click here and do your request.


back