Main > LITHOGRAPHY > PhotoLithography > Patterning. Use of > Undercoating Compn

Product Japan. T

PATENT ASSIGNEE'S COUNTRY Japan
UPDATE 09.99
PATENT ASSIGNEE Tokyo Ohka Kogyo
PATENT CLAIMS - N-contg organic crosslinker having > 2 amino/mole; each
amino substituted by hydroxyalkyl
- Homo- or copolymer of mixt of monomers of which one is
(meth)acrylic acid ester of aromatic hydroxyl compd selec
ted from: Biphenylsulfone & Benzophenone compds with
> one -OH
PATENT PHOTOCOPY Available on request

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