| PATENT ASSIGNEE'S COUNTRY | Germany |
| UPDATE | 10.99 |
| PATENT ASSIGNEE | Siemens |
| PATENT CLAIMS | Ozone-activated gas phase deposition using TEOS, which comprises steadily redg an initially high gas flow ratio of TEOS to ozone to a low steady-state ratio < 1 |
| PATENT PHOTOCOPY | Available on request |
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