| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 08.99 |
| PATENT ASSIGNEE | Shipley |
| PATENT CLAIMS |
Coated substrate comprising substrate having thereon - Coating layer of antireflective compn comprising resin binder, photoacid generator, the compn being free of cross linker - Coating layer of a chemically amplified positive acting photoresist over antireflective compn coat. layer, the photo resist comprising resin & photoacid generator |
| PATENT PHOTOCOPY | Available on request |
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