| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 02.00 |
| PATENT ASSIGNEE | Shin-Etsu Chemical |
| PATENT CLAIMS |
(Me)nSi(Cl)4-n; n = 0-4 mfg process - Charging reactor with contact mass comprising Si powder & Cu catalyst contg B (1-10,000 ppm) - Feeding reactant gas contg MeCl |
| PATENT PHOTOCOPY | Available on request |
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