| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 11.99 |
| PATENT ASSIGNEE | Shin-Etsu Chemical |
| PATENT CLAIMS |
(Me)aSi(Cl)4-a; a 0-4 prepn method - Charging reactor with contact means comprising Si powder & Cu catalyst - Feeding reactant gas contg MeCl into reactor whereby silane is formed by direct synthesis The Si powder satisfying Rosin-Rammler equation |
| PATENT PHOTOCOPY | Available on request |
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