| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 11.99 |
| PATENT ASSIGNEE | Shin-Etsu Chemical |
| PATENT CLAIMS |
Chemically amplified compn - Organic solvent - Base resin - Photoacid generator (1 mole) - N organic compd (0.05-0.5 moles) having pKa > 7 & vapor pressure < 2 Torr at 100C - N organic compd (0.01-1 mole) having pKa > 7 & vapor pressure of 2-100 Torr at 100C |
| PATENT PHOTOCOPY | Available on request |
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