| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 10.99 |
| PATENT ASSIGNEE | Shin-Etsu Chemical |
| PATENT CLAIMS |
- Contacting silane-contg. gas with liquid contg silanes which are higher boiling than silanes in said gas, for removing silanes in said gas |
| PATENT PHOTOCOPY | Available on request |
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