| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 11.99 |
| PATENT ASSIGNEE | Semitool Inc |
| PATENT CLAIMS |
Soln contg - Al-contg comp. - Si-contg comp. Both react to form an aluminosilicate on exposed Al metallized surface, the soln assisting in removal of residues from the workpiece |
| PATENT PHOTOCOPY | Available on request |
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