| STATUS | The Semiconductor Industry Association has established a "road map" into the next century, setting milestones for adoption of evershorter wavelengths of light for imaging of ever-finer features. For the period 2001-03, the target is 193 nm from argon fluoride lasers, & after 2003, the target is 157 nm from F lasers |
| UPDATE | 09.99 |
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