| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 12.99 |
| INVENTOR | This data is not available for free |
| PATENT ASSIGNEE | This data is not available for free |
| PATENT CLAIMS |
Spin coating method - Applying CO2 liquid contg coating compn to surface portion of substrate & then - Rotating said substrate about an axis to distribute said CO2 liquid on said substrate |
| PATENT PHOTOCOPY | Available on request |
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