| PATENT ASSIGNEE'S COUNTRY | Japan |
| UPDATE | 12.99 |
| PATENT ASSIGNEE | Mitsubishi Denki KK (Tokyo) |
| PATENT CLAIMS |
- Treat. tank contg treat. soln comprising heated PO4H3 - Means for circulating treat. soln - Means for adding NH4F to treat. soln - Means for detecting a F concn in said treat soln to allow adjustment of F concn by controlling an amount of F to be added as NH4F |
| PATENT PHOTOCOPY | Available on request |
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