Main > ELECTRONICS. > SemiConductor > Device > Photoresist > Positive Photoresist > Deep UV (157-nm) Photoresist > Polymer > FluoroPolymer > TriCycloNonene. F on Cycle. > Tert.-Bu Acrylate. Tetra-F Ethylene > 4th Not Disclosed CoMonomer? > CoPolymer.

Product USA. D

STUDY These copolymers display even greater transparency at 157 nm and greater thermal stability during processing.
UPDATE 03.03
AUTHOR This data is not available for free
LITERATURE REF. This data is not available for free

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