PATENT ASSIGNEE'S COUNTRY | Japan |
UPDATE | 07.99 |
PATENT ASSIGNEE | Kojundo Kagaku Kenkyusho KK (Saitama) |
PATENT CLAIMS |
- Trimethyl(ethylcyclopentadienyl)Pt (I) prepd by reaction of iodotrimethylplatinum with Na ethylcyclopentadienide in a solvent - Depositing a (I) film on substrate by CVD |
PATENT PHOTOCOPY | Available on request |
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