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Test wafers developed with MSQ are now available for etch, cleans, deposition and CMP studies. The wafers will be offered to semiconductor companies on a limited basis. "We’re making these wafers available to give semiconductor companies an opportunity to develop their low-k related products and processes. "Low-k dielectrics is a critical challenge for our members as well as the industry at large. By distributing these test wafers, "I" helps drive the industry to major low-k advancements. A lower ‘k-value’ dielectric improves chip speed and performance by allowing manufacturers to achieve smaller and higher density semiconductor devices with multi-layer interconnect structures. Spin-on dielectric materials are considered to be an enabling technology that will take the semiconductor industry to the next level in chip performance. Our work with "I" demonstrates the value companies can expect from spin-on low-k dielectrics. "Our hope is that this, and subsequent product releases, will give the semiconductor community the ability to develop the processes and products necessary to revolutionize the industry." The test wafers are processed using "J" 's MSQ & the "I" 's 800AZ Dual Damascene Reticle set.
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