| CLASSIFICATION | Market |
| TECHNOLOGY |
based on the acrylate platform. Although 193-nm lithography is nearly commercial, others point out that it wasn't perfected as quickly as expected. "We had 15 years to develop deep UV," compared to half that for 193 nm. "With 193, new chemistry and new materials required more development effort than the industry could accomplish in the time that it had." |
| UPDATE | 07.02 |
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| LITERATURE REF. | This data is not available for free |
| MARKETING BY | This data is not available for free |
| PRODUCTION BY | This data is not available for free |
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