| DESCRIPTION |
The system is equipped with a reactor chamber, an RF solid-state generator operating at 13.56 MHz capable of operating at from 0 to 500 watts power output, a microprocessor control system, and a complete vacuum pump package. The reaction chamber contains an unimpeded work volume of 16.75 inches in height, by 13.5 inches in width, by 17.5 inches in depth. For the application of the ammonia plasma and/or organic amine plasma, the equipment is operated at a power output of from about 50 to about 400 Watts, a gas flow rate of from about 400 to about 730 standard ml per minute for a time period of from 45 seconds, or less, up to about 6 minutes, and at temperatures of from room temperature to about 50.degree. C. A preferred range is from about 60 to about 120 Watts and an ammonia and/or organic amine flow rate in the range of from about 700 to about 730 standard ml/min, under a vacuum from about 0.1 Torr to about 0.5 Torr, at a temperature of from about 30.degree. C. to about 50.degree. C., for a period of from about 15 seconds to about 3 minutes.
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