| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 10.99 |
| PATENT ASSIGNEE | This data is not available for free |
| PATENT CLAIMS |
Coating with refractive index = 1.84-2.45 at deposition rate > 0.4 micro.m/hr at elev pressure (a) Mixing hydrocarbon gas & He to form precursor gas; He (> 40% by vol.) (b) Introducing substrate in reaction chamber (c) Introducing flow of precursor gas in chamber at pressure = 2-10 Torr (d) Inducing plasma by radio frequency means in precursor gas in proximity of substrate & operating at frequency < 100 kHz |
| PATENT PHOTOCOPY | Available on request |
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