PATENT CLAIMS |
A coating substrate for thin film coatings used in mfg electronic comp., said substrate comprising a rolled prodt of Al, the substrate having a surface to be coated which exhibits local irregularities formed as one of small holes, small-grained elements & needle shaped elements, all local irregularities on the substrate surface to be coated having a max. extension, measured vertically to the substrate surface of 0.1-10 micro.m are formed so that flanks of the local irregularities are exposable completely to material deposition impinging on the substrate surface in the perpendicular manner, the max extension of each local irregularity, measured paralell to substrate surface is > equal to a corresponding extension in a vertical direction, thereby avoiding defects in electronic comp.
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