| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 12.00 |
| PATENT ASSIGNEE | Air Products & Chemicals |
| PATENT CLAIMS |
- Contacting substrate with cleaning reagent at 50-125C to form volatile by-prodts of said SiO2/Metal - Removing said by-prodts from surface Wherein said cleaning reagent is complex of HF & compd selected from - 1,2-Propanedione - Beta-diketone - Beta-diketoimine: CH2(COMe)2 |
| PATENT PHOTOCOPY | Available on request |
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