| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 07.00 |
| PATENT ASSIGNEE | This data is not available for free |
| PATENT CLAIMS |
- Blending a nanoporous silica precursor compn comprising at least one alkoxysilane, at least one rel. low volatility sol vent compn comprising an ether of 1-4C alkylene glycol which is miscible in water & alkoxysilane, having hydroxyl concn < 0.021 mole/cubic.cm, boiling point > 75C at 1 atm & MW > 100; at least one rel. high volatility solvent compn having boiling point < that of the rel. low volatility solvent compn; optional water & optional catalytic amount of an acid thus forming mixt & causing partial hydrolysis & condensa tion of alkoxysilane - Depositing compn onto substrate while evaporating at least portion of the rel. high volatility solvent compn - Exposing compn to water vapor & NH3 vapor - Evaporating rel. low volatility solvent compn, thereby forming Si contg polymer compn on the substrate, wherein the Si contg polymer compn has a dielectric constant 1.3-3.5 & d. 0.25-1.9 g/ml |
| PATENT PHOTOCOPY | Available on request |
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