| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 09.99 |
| PATENT ASSIGNEE | Allied Signal |
| PATENT CLAIMS |
- Spin coating dielectric compn comprising material selec ted from: silicates etc to surface of substrate to uniformly coat & fill voids continuously across substrate surface - Curing by EB cure treat - Performing CMP step |
| PATENT PHOTOCOPY | Available on request |
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