| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 11.00 |
| PATENT ASSIGNEE | Agilent Technologies |
| PATENT CLAIMS |
Method for preventing water or O from a source thereof reaching a device, comprising - Depositing a first polymer layer between said device & said source - Depositing an inorganic layer on said first polymer layer of said device by ECR-PECVD & - Depositing a second polymer layer on said inorganic layer |
| PATENT PHOTOCOPY | Available on request |
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