| PATENT ASSIGNEE'S COUNTRY | USA |
| UPDATE | 05.00 |
| PATENT ASSIGNEE | This data is not available for free |
| PATENT CLAIMS |
Method for purifying HF, for use in the mfg of an electronic comp., comprising - Providing a flow of HF vapor comprising a low concn of As - Introducing said flow of HF vapor into an ionic purifier which provides a recirculating vol. of high purity water contg a high concn of HF. Wherein said recirculating vol. of high purity water is in contact with said flow of HF vapor, & Wherein a flow of purified HF vapor flows from said ionic purifier |
| PATENT PHOTOCOPY | Available on request |
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