Main > COATINGS > Chemical Vapor Deposition (CVD) > Group II Metal Coatings

Product USA. A

PATENT ASSIGNEE'S COUNTRY USA
UPDATE 08.00
PATENT ASSIGNEE Advanced Technology Materials
PATENT CLAIMS Group II metal beta-diketonate adduct compn having at least one adduct ligand selected from group of ligands of the formulae:
- Imines: RR'C=N-G-N=CRR', wherein R,R' are alkyl, fluoroal
kyl ir R & R' together with the adjacent C atom form a cyclo
alkyl group, & G is -(CH2-)x; x = 1-10
- Imines: RR'C=N-G-NH2; R,R' & G as above
- Amines: G(NH2)2; G as above
PATENT PHOTOCOPY Available on request

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