PATENT ASSIGNEE'S COUNTRY | USA |
UPDATE | 08.00 |
PATENT ASSIGNEE | Advanced Technology Materials |
PATENT CLAIMS |
Group II metal beta-diketonate adduct compn having at least one adduct ligand selected from group of ligands of the formulae: - Imines: RR'C=N-G-N=CRR', wherein R,R' are alkyl, fluoroal kyl ir R & R' together with the adjacent C atom form a cyclo alkyl group, & G is -(CH2-)x; x = 1-10 - Imines: RR'C=N-G-NH2; R,R' & G as above - Amines: G(NH2)2; G as above |
PATENT PHOTOCOPY | Available on request |
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