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Product Acrylic. Deep UV. USA. B.

PATENT ASSIGNEE'S COUNTRY USA
UPDATE 07.99
PATENT ASSIGNEE This data is not available for free
PATENT CLAIMS - Reaction prodt of high MW acrylic polymer & deep UV
light-absorbing carboxylic acid dye; linkage via a hydroxy
ester moiety formed in situ during reaction
- Alkylated aminoplast cross-linker derived from melamine
- Protonic acid cure catalyst
- Low-to-medium boiling point, i.e. 70 - 180C alc.-contg sol
vent system comprising > 20 % alc.
Whereby said compn has improved plasma etch rate while retaining fast cure speed, high optical d., good soly., in & coatability from safe, volatile solvents having high differential soly., as between photoresist & having improved conformability & feature coverage
PATENT PHOTOCOPY Available on request

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