PATENT ASSIGNEE'S COUNTRY | USA |
UPDATE | 07.99 |
PATENT ASSIGNEE | This data is not available for free |
PATENT CLAIMS |
- Reaction prodt of high MW acrylic polymer & deep UV light-absorbing carboxylic acid dye; linkage via a hydroxy ester moiety formed in situ during reaction - Alkylated aminoplast cross-linker derived from melamine - Protonic acid cure catalyst - Low-to-medium boiling point, i.e. 70 - 180C alc.-contg sol vent system comprising > 20 % alc. Whereby said compn has improved plasma etch rate while retaining fast cure speed, high optical d., good soly., in & coatability from safe, volatile solvents having high differential soly., as between photoresist & having improved conformability & feature coverage |
PATENT PHOTOCOPY | Available on request |
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