Main > ELECTRONICS. > Electron > Beam > Imaging. Use > Poly(Aniline)

Product Taiwan. U

PATENT ASSIGNEE'S COUNTRY Taiwan
UPDATE 11.99
PATENT ASSIGNEE United Microelectronics Corp
PATENT CLAIMS Method of forming an electronic device
- Providing a gate oxide layer over substrate
- Providing conducting layer over gate oxide layer
- Providing resist layer over conducting layer
- Providing charge dissipation layer over resist layer, inclu
ding conducting polymer structure
-{-C6H4-N[(CH2)3-R]-C6H4-N[(CH2)3-R]-C6H4-N=C6H4=N
-}x; R = acid; x = designates that structure is repeated
- Exposing resist layer to EB to form pattern in resist layer
- Developing resist layer
PATENT PHOTOCOPY Available on request

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